Material:High-grade stainless steel

Max Vacuum Compatibility:Ultra-high vacuum

Temperature Range:-20°C to +150°C

Electrostatic Force Adjustment:Variable through electronic control

Operating Pressure:0.1 Torr

Chucking Capacity:50 mm x 50 mm

Vacuum Pump Compatibility:Industry-standard compatible

    The LAM 839-800327-315 Electrostatic Chuck is engineered for optimal performance in the most demanding semiconductor fabrication environments. Its advanced electrostatic force technology ensures precise and consistent hold on materials, enhancing process efficiency and yield.

    Crafted from high-grade stainless steel, this chuck is robust yet lightweight, providing durability and ease of handling during installation and maintenance.

    Operating within an expansive temperature range from -40°C to +200°C, it maintains its effectiveness across various manufacturing processes, making it suitable for a wide array of applications in the semiconductor industry.

    Designed for seamless integration with all standard industrial vacuum systems, the LAM 839-800327-315 Electrostatic Chuck simplifies setup and reduces downtime, ensuring continuous production flow.

    With dimensions measuring 150mm x 150mm x 50mm and a manageable weight of approximately 5kg, it offers flexibility in space constraints and is easily transportable between different manufacturing stations.