2. Main Technical Parameters

3. Product Features

• High Stability and High Precision: Customized for high-end thin-film processing technologies, the device delivers stable and consistent power output to meet strict industrial process requirements.
• Fast Arc Extinguishing Function: Effectively ensures the accuracy of coating processes and avoids product scrapping caused by unstable plasma status, greatly improving production yield.
• Modular Design: Adopts a standardized modular structure, which simplifies daily maintenance, component replacement and equipment upgrade procedures, reducing operation and maintenance costs.
• Impedance Matching Function: Compatible with PFM series matching boxes. It can automatically adjust impedance parameters to reduce reflected power and improve energy utilization efficiency.
• Intelligent Protection System: Integrated with multiple protection mechanisms including overload protection, low voltage protection, low current protection and continuous over-temperature control to ensure safe and stable long-term operation.
• User-Friendly Interface: Equipped with an intuitive graphical parameter display screen, realizing visual parameter monitoring and simple and convenient manual operation.

4. Structure and Composition

4.1 RF Power Supply System Working Flow

4.2 Main Components

• Control and Excitation Module: Responsible for signal generation, parameter control and drive signal output.
• Power Amplification Module: Composed of multi-channel parallel amplifiers to realize stable power amplification output.
• Output Synthesis Module: Completes signal synthesis and filtering processing to ensure pure and stable output signals.
• Feedback Module: Real-time detection and closed-loop control of forward and reverse power to guarantee output accuracy.
• Optional Matching Box: PFM series matching box is optional for professional impedance matching optimization.

5. Application Fields

• Semiconductor manufacturing: wafer processing, thin film deposition and etching processes
• Magnetron sputtering coating: thin film deposition of various metal and non-metal materials
• Ion implantation: semiconductor doping process production
• Induction heating: industrial high-precision heating scenarios
• Vacuum thin film industry: various types of vacuum coating and thin film processing technologies
• Flat panel display industry: thin film transistor (TFT) manufacturing process
• Photovoltaic industry: solar cell thin film preparation and manufacturing
• Scientific research and education: plasma physics research and experimental teaching

6. Installation Requirements

6.1 Power Connection Inspection

• Ensure that the power plug is firmly and completely inserted into the power socket
• Check the power cord for damage, aging or breakage
• Confirm smooth power circuit without short circuit or open circuit faults

6.2 Environmental Requirements

• Install in an environment with appropriate temperature and humidity to avoid extreme working conditions
• Guarantee unobstructed ventilation and good heat dissipation conditions
• Keep away from strong electromagnetic interference sources to prevent signal disorder

6.3 Grounding Requirements

• Implement reliable equipment grounding to ensure personal and equipment operation safety
• All grounding operations shall conform to national and industrial electrical safety standards

6.4 Space Layout Requirements

• Reserve sufficient surrounding space for equipment heat dissipation
• Ensure convenient access for daily operation, inspection and later maintenance

7. Maintenance and Upkeep

7.1 Daily Inspection

• Verify the normal operation of the equipment output function
• Monitor the stability of output voltage and power data in real time
• Check whether the display screen works normally with clear and accurate parameter display

7.2 Regular Maintenance

• Inspect internal circuit boards, wiring terminals and connecting lines for looseness or damage
• Clean the cooling system regularly to remove dust and dirt and ensure heat dissipation efficiency
• Detect the operating status of the matching box and calibrate parameters if necessary

7.3 Fault Handling

• Common faults include output power deviation, unstable voltage, abnormal screen display and other operational failures
• All fault inspection and repair work is recommended to be completed by a professional maintenance team

7.4 Professional Maintenance Service